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MEMS Mechanical Sensors Steve P. Beeby

MEMS Mechanical Sensors

Steve P. Beeby

Published May 14th 2004
ISBN : 9781580535366
Hardcover
269 pages
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 About the Book 

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices- however, attention is also given to manufacturing techniques and materials, as well as the basicMoreThe main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices- however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.